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Manual Mode Operation: An additional set of switches and monitor is available for manual load mounting operation. |
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Partial Wafer Mounting: Partial wafer mounting can be done by manually loading wafer into mounting chamber with
the help of spaces supporting the broken edges. No reprogramming or parameter setting is required.
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Wafer Thickness: Wafer chuck is designed in such a way that it can handle thickness of 4 mil to 50 mil without any
conversion or adjustment.
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Wafer Orientation: Robot arm can be programmed such that wafer is placed at 0, 90, 180, or 270 degrees with reference to frame.
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UV Tape Capability: Machine includes a liner tape rewind assembly to handle UV tape.
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ESD Protection: Two ionizers are positioned beneath the adhesive tape and above the mounting chamber to remove any static charge generated.
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Vacuum Supply:Integrated vacuum pump is standard on machine. No need for the vacuum facilities.
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Machine Safety: Doors are interlocked with EMO.
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Wafer/Frame ID System (Optional): An optical character recognition system for wafer and bar code reader for frame are
available per custom specification.
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