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Air Bubbles Free Mounting |
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Minimal Contact with Wafer. |
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Vacuum Mount, No Roller |
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3" to 8" Wafer Capability |
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UV Tape Capability. |
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High Accuracy in X-Y & Theta Rotation |
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Wafer/tape is mounted inside a vacuum chamber. Nothing touches wafer except tape and edge support. |
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No roller required. No more difficult alignment of roller/wafer parallelism, roller cleaning, and no pressure variation on wafer due to different thickness. |
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Absolutely no air bubble and better adhesion. |
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Tape tension is controlled and programmable. |
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Quick change wafer chuck. |
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